Page 104 - FTA무역리포트

FTA 품목분류 HS 품목분류표상 “반도체 칩의 기술진화(MEMS)”

(2) Semiconductor-based actuators MEMS mirrors ;
LIDAR (Light Detection and Ranging), laser projectors, position measurement, etc.

Thermal isolation
x
Cu/W/Cu Embedded W heater
Multimorph

Cu/W
Voltag
y

Silicon substrale
(a) (b)

(3) Semiconductor-based resonators ; film bar acoustic wave resonators(FBAR) of RF
technology for multiplexing, etc.

Semiconductor
Electrodes
based substrate
Piezoelectric layer support layer

Substrate Air cavity

Film Bulk Acoustic Resonator (FBAR)-BAW Filter -Croce-Section View(2)

(4) Semiconductor-based oscillators ;

physical phenomena (stored energy of
electromagnetic fields inside a resonator)
into an electrical signal (output voltage
with frequency depending on tuning
voltage)
Typical physical appearance
of a packaged oscillator

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